MOFs taking on gas-purification: The semiconductor industry

By | Cleanrooms, Gas Capture and Sequestration, Semiconductors | No Comments
The semiconductor industry relies heavily on highly purified gases for their production processes. Metal-organic frameworks (MOFs) have shown great potential in gas purification and other related applications. In this article, we will take a look at how gases used in the fabrication process of semiconductors are purified and where metal-organic frameworks can be applied. Read More